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curvature measurement tool  (KLA Tencor)

 
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    Structured Review

    KLA Tencor curvature measurement tool
    Curvature Measurement Tool, supplied by KLA Tencor, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/curvature+measurement+tool/curvature+measurement+tool/us07102853-154-2-5
    Average 90 stars, based on 1 article reviews
    curvature measurement tool - by Bioz Stars, 2026-10
    90/100 stars

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    Related Articles

    other:

    Article Title: Negative thermal expansion dielectrics for thermal pole tip protrusion compensation
    Article Snippet: A commercial curvature measurement tool (KLA-Tencor Corp., San Jose, Calif. FLX SeriesTM) was used, in which the wafer was heated by an enclosed hot plate in an inert environment (nitrogen).



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